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Mems & microsystems : design and manufacture /

Hsu, Tai-Ran

Mems & microsystems : design and manufacture / Mems and microsystems : design and manufacture Tai-Ran Hsu - International ed. - Boston, Mass. : McGraw-Hill, 2002 - 436 p. : ill.

Includes bibliographical references and index

ISBN: 0071204768

Subjects--Topical Terms:
MICROELECTRONICS
MICROELECTROMECHANICAL SYSTEMS
MICROELECTRONIC PACKAGING

LC Class. No.: TK7874 / H78M 2002

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