Semiconductor fabrication : (Record no. 206747)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01744nam0a22003370a04500 |
| 001 - CONTROL NUMBER | |
| control field | 000126893 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250302054837.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | s1989 xxu fnx000 000 0neng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0803112734 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | 2004006001 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | S454 |
| 245 00 - TITLE STATEMENT | |
| Title | Semiconductor fabrication : |
| Remainder of title | technology and metrology / |
| Statement of responsibility, etc. | Dinesh C. Gupta, editor |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Philadelphia, Pa. : |
| Name of publisher, distributor, etc. | ASTM, |
| Date of publication, distribution, etc. | 1989 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 476 p. : |
| Other physical details | ill. |
| 490 0# - SERIES STATEMENT | |
| Series statement | STP ; |
| Volume/sequential designation | 990 |
| Series statement | ASTM special technical publication ; |
| Volume/sequential designation | 990 |
| 500 ## - GENERAL NOTE | |
| General note | Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute |
| General note | "ASTM publication code number (PCN) 04-990000-46" |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographies and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | SEMICONDUCTORS |
| General subdivision | DESIGN AND CONSTRUCTION |
| Form subdivision | CONGRESSES |
| 9 (RLIN) | 95180 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gupta, Dinesh C., |
| Relator term | ed. |
| 9 (RLIN) | 95181 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | ASTM Committee F-1 on Electronics |
| 9 (RLIN) | 95182 |
| Corporate name or jurisdiction name as entry element | Semiconductor Equipment and Materials Institute |
| 9 (RLIN) | 95183 |
| 711 2# - ADDED ENTRY--MEETING NAME | |
| Meeting name or jurisdiction name as entry element | Symposium on Semiconductor Processing |
| Number of part/section/meeting | (5th : |
| Date of meeting or treaty signing | 1988 : |
| Location of meeting | Santa Clara, Calif.) |
| 9 (RLIN) | 95184 |
| 949 ## - LOCAL PROCESSING INFORMATION (OCLC) | |
| b | 200406150058 |
| p | 1050.00 |
| n | BUR |
| r | SID01 RONO20040311 ORDNO158 |
| t | 10 |
| c | 10 |
| l | B |
| h | TK7871.85 |
| j | 0 |
| i | S454 |
| b | 200406150059 |
| p | 1050.00 |
| n | BUK |
| r | SID01 RONO20040311 ORDNO158 |
| t | 10 |
| c | 10 |
| l | B |
| h | TK7871.85 |
| j | 0 |
| i | S454 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | A40064 |
| Link information for field corresponding to 9XX field | Jun 25 2004 9:06AM |
| 991 00 - BU INFORMATION | |
| BU Field of Study | 0900 āļāļāļ°āļ§āļīāļĻāļ§āļāļĢāļĢāļĄāļĻāļēāļŠāļāļĢāđ. āļāļāļ°āļ§āļīāļĻāļ§āļāļĢāļĢāļĄāļĻāļēāļŠāļāļĢāđ (āļāļĢāļēāļāļ§āļīāļĻāļ§āļāļĢāļĢāļĄ āļāļĨāļĻāļēāļŠāļāļĢāđ āļāļĨāļĻāļēāļŠāļāļĢāđ āļāļāļīāļāļĻāļēāļŠāļāļĢāđāļ§āļīāļĻāļ§āļāļĢāļĢāļĄ) |
| 997 ## - BU TRANSFER | |
| -- | 00 |
| -- | āļāļāļ°āļ§āļīāļĻāļ§āļāļĢāļĢāļĄāļĻāļēāļŠāļāļĢāđ (āļāļĢāļēāļāļ§āļīāļĻāļ§āļāļĢāļĢāļĄ āļāļĨāļĻāļēāļŠāļāļĢāđ āļāļĨāļĻāļēāļŠāļāļĢāđ āļāļāļīāļāļĻāļēāļŠāļāļĢāđāļ§āļīāļĻāļ§āļāļĢāļĢāļĄ) |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Library of Congress Classification |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Date last checked out |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Available | Books | BU Library and Learning Space | BU Library and Learning Space | Book Shelves | 2019-05-30 | TK7871.85 S454 | 200406150058 | 2019-05-30 | 2019-05-30 | Books | |||||
| Library of Congress Classification | Available | Books | BU Library and Learning Space | BU Library and Learning Space | Book Shelves | 2019-05-30 | 1 | TK7871.85 S454 | 200406150059 | 2024-02-02 | 2019-05-30 | Books | 2023-08-23 |
