Ruska, W. Scot <br/><br/>
Microelectronic processing : an introduction to the manufacture of integrated circuits 

 - New York, N.Y. :  McGraw-Hill,  1987 
 - 430 
<br/><br/><label>Subjects--Topical Terms: </label><br/>INTEGRATED CIRCUITS--DESIGN AND CONSTRUCTION
<br/><br/><label>LC Class. No.: </label>TK7874  / R874M