| 000 | 01744nam0a22003370a04500 | ||
|---|---|---|---|
| 001 | 000126893 | ||
| 005 | 20250302054837.0 | ||
| 008 | s1989 xxu fnx000 000 0neng d | ||
| 020 | _a0803112734 | ||
| 035 | _a2004006001 | ||
| 050 | 4 |
_aTK7871.85 _bS454 |
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| 245 | 0 | 0 |
_aSemiconductor fabrication : _btechnology and metrology / _cDinesh C. Gupta, editor |
| 260 |
_aPhiladelphia, Pa. : _bASTM, _c1989 |
||
| 300 |
_a476 p. : _bill. |
||
| 490 | 0 |
_aSTP ; _v990 |
|
| 490 | 0 |
_aASTM special technical publication ; _v990 |
|
| 500 | _aPapers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute | ||
| 500 | _a"ASTM publication code number (PCN) 04-990000-46" | ||
| 504 | _aIncludes bibliographies and indexes | ||
| 650 | 0 |
_aSEMICONDUCTORS _xDESIGN AND CONSTRUCTION _vCONGRESSES _995180 |
|
| 700 | 1 |
_aGupta, Dinesh C., _eed. _995181 |
|
| 710 | 2 |
_aASTM Committee F-1 on Electronics _995182 |
|
| 710 | 2 |
_aSemiconductor Equipment and Materials Institute _995183 |
|
| 711 | 2 |
_aSymposium on Semiconductor Processing _n(5th : _d1988 : _cSanta Clara, Calif.) _995184 |
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_aA40064 _bJun 25 2004 9:06AM |
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_b00 _cคณะวิศวกรรมศาสตร์ (กราฟวิศวกรรม กลศาสตร์ พลศาสตร์ คณิตศาสตร์วิศวกรรม) |
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