Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor

Contributor(s):

Material type: Text

TextSeries: STP ; 990 | ASTM special technical publication ; 990Publication details: Philadelphia, Pa. : ASTM, 1989Description: 476 p. : illISBN:

0803112734

Subject(s):

SEMICONDUCTORS -- DESIGN AND CONSTRUCTION -- CONGRESSES

LOC classification:

TK7871.85 S454

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Item type	Home library	Collection	Shelving location	Call number	Status	Barcode
Books	BU Library and Learning Space	Books	Book Shelves	TK7871.85 S454 (Browse shelf(Opens below))	Available	200406150058
Books	BU Library and Learning Space	Books	Book Shelves	TK7871.85 S454 (Browse shelf(Opens below))	Available	200406150059

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Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute

"ASTM publication code number (PCN) 04-990000-46"

Includes bibliographies and indexes

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Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor

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